Title:
【発明の名称】加速度検出素子の製造方法
Document Type and Number:
Japanese Patent JP3094757
Kind Code:
B2
Abstract:
PURPOSE:To provide a method for manufacturing an acceleration detecting element in which an element electrode layer can be formed at each symmetric position with reference to the cementing part of opposing faces in a cemented ceramic board. CONSTITUTION:The acceleration detecting element is manufactured by cementing piezoelectric ceramic blocks 1 while facing each other and slicing into a cemented ceramic plate 3. Electrodes are then formed on the opposite sides of the plate 3. A part 9 of predetermined width traversing the cemented part 3a of the cemented ceramic plate 3 is then removed from the electrode layer 8 formed entirely on one side of the plate 3 thus forming two isolated element electrode layer 5.
Inventors:
Jun Tabota
Hiroshi Asano
Toshihiro Mizuno
Hiroshi Asano
Toshihiro Mizuno
Application Number:
JP28363593A
Publication Date:
October 03, 2000
Filing Date:
November 12, 1993
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01P15/09; H01L29/84; H01L41/09; (IPC1-7): G01P15/09; H01L29/84; H01L41/09
Domestic Patent References:
| JP5188081A | ||||
| JP5267742A | ||||
| JP2159980A | ||||
| JP6268276A | ||||
| JP6222074A | ||||
| JP5215766A |
Attorney, Agent or Firm:
Kazuhide Okada