Title:
【考案の名称】半導体の製造設備
Document Type and Number:
Japanese Patent JPH0735392
Kind Code:
Y2
Inventors:
Sugihara Yukio
Fukushima Tamio
Fukushima Tamio
Application Number:
JP13880889U
Publication Date:
August 09, 1995
Filing Date:
November 30, 1989
Export Citation:
Assignee:
Nippon Steel Semiconductor Co., Ltd.
International Classes:
F24F7/06; B01L1/04; H01L21/02; H01L21/66; (IPC1-7): H01L21/66; B01L1/04; F24F7/06; H01L21/02
Domestic Patent References:
| JP60239036A |
Attorney, Agent or Firm:
Nobuo Kaida (1 person outside)
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