Title:
SURFACE INSPECTING APPARATUS
Document Type and Number:
Japanese Patent JP3068959
Kind Code:
B2
Abstract:
PURPOSE: To provide a surface inspecting apparaus with high resolution and high function by reflecting the distance fluctuation between a probe and an inspection object upon the slight movement of the probe as a feedback as to keep the electrostatic capacity between the probe and the inspection object constant.
CONSTITUTION: When the distance Δd between a probe and the surface of a wafer increases due to the undulation of the surface during the scanning, the electrostatic capacity of the probe decreases by Δc and the resonance frequency increases by Δf and the V-f curve shifts to right by Δf as shown by the dotted line. Here, the output voltage in a specified frequency band f0 rises by ΔV, corresponding to the resonance frequency increase Δf. That is, the fluctuation ΔV in the f0 reflects the unevenness of the wafer's surface. A tremor element controlling circuit sends out the pulse voltage corresponding to the ΔV to the tremor element, so that the distance between the wafer and the probe is feedback-controlled and thus the electrostatic capacity C is kept constant.
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Inventors:
Yoshiaki Akama
Application Number:
JP18651792A
Publication Date:
July 24, 2000
Filing Date:
July 14, 1992
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01B7/00; G01B7/34; G01Q30/04; G01Q60/46; (IPC1-7): G01B7/34; G01B7/00
Domestic Patent References:
| JP412547A | ||||
| JP293304A | ||||
| JP5696202A | ||||
| JP56107120A |
Attorney, Agent or Firm:
Hideaki Togawa