【考案の名称】基板搬送装置 - Shibaura Manufacturing Co., Ltd.

Title:

【考案の名称】基板搬送装置

Document Type and Number:

Japanese Patent JP2585146

Kind Code:

Y2

Inventors:

Akira Nakai
Kimura Mayor
Hitoshi Sato
Mitsuhiro Ishihara

Application Number:

JP5215291U

Publication Date:

November 11, 1998

Filing Date:

July 06, 1991

Export Citation:

Assignee:

Shibaura Manufacturing Co., Ltd.

International Classes:

B65G25/02; B65H5/04; H01L21/66; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G25/02; B65H5/04; H01L21/66

Domestic Patent References:

JP59201782A
JP5815353U

Attorney, Agent or Firm:

Mitsuharu Kiuchi

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