Title:
【発明の名称】プラズマエツチング方法
Document Type and Number:
Japanese Patent JP2535524
Kind Code:
B2
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Inventors:
NISHIBE HARUHITO
Application Number:
JP2872787A
Publication Date:
September 18, 1996
Filing Date:
February 10, 1987
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065
Domestic Patent References:
| JP61242039A | ||||
| JP57124440A |
Attorney, Agent or Firm:
Teiichi