【発明の名称】シリサイドターゲットとその製造方法

Title:

【発明の名称】シリサイドターゲットとその製造方法

Document Type and Number:

Japanese Patent JP2594794

Kind Code:

B2

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Inventors:

Sawada Susumu
Yuichi Numata
Osamu Kano

Application Number:

JP19527787A

Publication Date:

March 26, 1997

Filing Date:

August 06, 1987

Export Citation:

Assignee:

Japan Energy Co., Ltd.

International Classes:

C04B35/58; C23C14/34; (IPC1-7): C23C14/34; C04B35/58

Domestic Patent References:

Attorney, Agent or Firm:

Motohiro Kurauchi (1 outside)

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