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Title:
APPARATUS FOR PRODUCTION OF SILICON SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPH0616490
Kind Code:
A
Abstract:

PURPOSE: To control the gas from a melt and to suppress an increase in carbon concn. and defects without changing a heat balance by disposing a structure consisting of a specific material in order to control gaseous flow above the melt with the apparatus for production of the silicon single crystal by a Czochralski method.

CONSTITUTION: The apparatus 1 for the silicon single crystal consists of a chamber 2, a heat insulating material 3, a heater 4, a protective body 5 and a quartz crucible 6 and a seed crystal is mounted to a pulling up shaft 8. The seed crystal is pulled up while the crystal is immersed into the melt 7, by which the columnar silicon single crystal 9 is produced. The structure (e.g.: made of quartz glass) 11 for controlling the flow of the gaseous SiO from the melt 7 is constituted of a cylindrical part 12 and an inverted circular conical part 13 and is imposed on a cylindrical support 14. An inert gas is introduced from an introducing path 10, is introduced to a lower aperture through the circumference of the silicon single crystal 9 in the cylindrical part 12 of the structure 11 according to an arrow and is further introduced diagonally upward from the surface of the melt 7 through the inverted circular conical part 13. As a result, the gaseous SiO is led radially outward and is prevented from sticking and falling.


Inventors:
KAJITA EIJI
Application Number:
JP17223992A
Publication Date:
January 25, 1994
Filing Date:
June 30, 1992
Export Citation:
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Assignee:
KYUSHU ELECTRON METAL
SUMITOMO SITIX CORP
International Classes:
C30B15/00; C30B29/06; H01L21/208; (IPC1-7): C30B15/00; C30B29/06; H01L21/208
Attorney, Agent or Firm:
Mori Masazumi