Title:
WASHING METHOD
Document Type and Number:
Japanese Patent JPH078925
Kind Code:
A
Abstract:
PURPOSE: To efficiently remove fine particles of a submicron order.
CONSTITUTION: In washing the surface 22 to be washed of an object 18 to be washed, liquid droplets 26 of low temp. liquefied gas 24 are formed on the surface to be washed and moved on the surface to be washed to be taken therein to perform washing.
Inventors:
KOMINO MITSUAKI
Application Number:
JP17272593A
Publication Date:
January 13, 1995
Filing Date:
June 18, 1993
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B08B3/04; H01L21/304; (IPC1-7): B08B3/04; H01L21/304
Attorney, Agent or Firm:
Akihiro Asai (1 person outside)
Next Patent: APPARATUS AND METHOD FOR WASHING AND DRYING