Title:
ナノ粒子製造方法
Document Type and Number:
Japanese Patent JP4837409
Kind Code:
B2
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Inventors:
Yoshiaki Agawa
Yasuhiro Hara
Amano Shigeru
Atsushi Saito
Yasuhiro Hara
Amano Shigeru
Atsushi Saito
Application Number:
JP2006076774A
Publication Date:
December 14, 2011
Filing Date:
March 20, 2006
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B22F9/14; B01J19/08; C23C14/24
Domestic Patent References:
JP2004307241A | ||||
JP2003321769A | ||||
JP2004292830A |
Attorney, Agent or Firm:
Shigeo Ishijima
Hideki Abe
Hideki Abe