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Title:
NEW LACTONE COMPOUND AND NEW ACRYLIC ACID DERIVATIVE
Document Type and Number:
Japanese Patent JP2005002060
Kind Code:
A
Abstract:

To provide a new acrylic acid derivative having excellent solubility in a resist solvent and capable of obtaining a radiation sensitive resin which reduces the roughness of sidewalls of patterns after development, and a new lactone which comes to an intermediate for producing the derivative.

The new lactone is represented by formula (1) or formula (2). The new acrylic acid derivative can be obtained from this compound.


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Inventors:
NISHIMURA ISAO
OKAMOTO KENJI
HIROSE YOICHIRO
SUZUKI SACHIKO
Application Number:
JP2003168769A
Publication Date:
January 06, 2005
Filing Date:
June 13, 2003
Export Citation:
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Assignee:
JSR CORP
International Classes:
G03F7/039; C07D307/33; C07D307/94; (IPC1-7): C07D307/33; C07D307/94; G03F7/039
Attorney, Agent or Firm:
Wake Manipulation



 
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