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Patent Searching and Data


Title:
NONLINEAR ELEMENT
Document Type and Number:
Japanese Patent JPH03280470
Kind Code:
A
Abstract:

PURPOSE: To enable a nonlinear element to be stably formed by a method wherein a nonlinear electric conduction induction layer is formed thicker than an initially formed conductor.

CONSTITUTION: An element is set 20μm square in size, and silicon is diffused into the element so as to set the element to be 5×10A in concentration when the element is in an ON state and to be 5×10A in concentration in an OFF state. A nonlinear electric conduction induction layer 13 is formed as thick as 2400 under these conditions. Chrome is evaporated to form a lower electrode 12 on a substrate 11. The lower electrode 12 of chrome is made to change in thickness by stages conforming to 500, 1000, 1500, 1900, 2400, 2900, 3500, 4000, 5000, and 6000, and the thickness of the nonlinear electric conduction induction layer 13 is fixed to 2400. A material dispersed liquid is applied onto the substrate 11 formed as above, which is dried up, and a chrome is evaporated as thick as 700 or so to form an upper electrode to constitute a nonlinear element.


Inventors:
SUGIYAMA ATSUSHI
Application Number:
JP8020890A
Publication Date:
December 11, 1991
Filing Date:
March 28, 1990
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H01L51/05; H01L51/40; (IPC1-7): H01L29/28
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)