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Title:
OBJECT LEVITATION CARRYING DEVICE
Document Type and Number:
Japanese Patent JP2005239392
Kind Code:
A
Abstract:

To provide an object levitation carrying device capable of improving levitation force by small energy consumption as compared with a device levitating an object only by jetting pressure of compressed gas, and saving a manufacturing cost by simplifying a structure as compared with an electrostatic levitation carrying device.

The object levitation carrying device 10 is equipped with a plurality of sound wave levitation devices 11, and the sound wave levitation devices 11 are arranged in series to structure a carrying path for carrying an object 12 while levitating. Each sound wave levitation device 11 is equipped with a vibrating plate 14 excited by an exciting means, and the exciting plate 14 is horizontally supported to a supporting plate 13 through a set of horns 15a, 15b and a vibrator 16. A compressed gas jetting means for assisting levitation of the object 12 is provided in at least a part of the carrying path. The compressed gas jetting means 26 is provided at a position corresponding to a transfer part of the object 12 between the sound wave levitation devices adjacent to each other.


Inventors:
TAKASABU MASAMI
Application Number:
JP2004054256A
Publication Date:
September 08, 2005
Filing Date:
February 27, 2004
Export Citation:
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Assignee:
TOYOTA IND CORP
International Classes:
B65G51/03; B65G27/10; B65G27/34; B65G49/06; B65G49/07; B65G54/02; H01L21/677; H01L21/68; H02N13/00; (IPC1-7): B65G27/34; B65G27/10; B65G49/06; B65G49/07; B65G51/03; B65G54/02; H01L21/68; H02N13/00
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda