To provide an object levitation carrying device capable of improving levitation force by small energy consumption as compared with a device levitating an object only by jetting pressure of compressed gas, and saving a manufacturing cost by simplifying a structure as compared with an electrostatic levitation carrying device.
The object levitation carrying device 10 is equipped with a plurality of sound wave levitation devices 11, and the sound wave levitation devices 11 are arranged in series to structure a carrying path for carrying an object 12 while levitating. Each sound wave levitation device 11 is equipped with a vibrating plate 14 excited by an exciting means, and the exciting plate 14 is horizontally supported to a supporting plate 13 through a set of horns 15a, 15b and a vibrator 16. A compressed gas jetting means for assisting levitation of the object 12 is provided in at least a part of the carrying path. The compressed gas jetting means 26 is provided at a position corresponding to a transfer part of the object 12 between the sound wave levitation devices adjacent to each other.
Makoto Onda
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