To accurately move the focal position of an objective lens by several m without being affected by backlash of a feed mechanism and stepping-out of a stepping motor, or hysteresis or the like of a piezo-actuator.
The observation device 1 includes a light source 3 emitting light of predetermined wavelength, an illumination optical system 4 irradiating an object A to be observed with the light emitted from the light source 3, a detection optical system 5 having the objective lens 12 condensing transmitted light through the object A that is the light with which the object A is irradiated by the illumination optical system, and an image sensor 6 photographing the transmitted light condensed by the detection optical system 5. The detection optical system 5 includes optical distance varying means 13 to 15 changing an optical distance in an optical path between the object A and the image sensor 6 on the optical path.
OKAZAKI YOSHIAKI
KOBAYASHI MASAYUKI
SAKAMOTO YOSHIMIZU
| JPH0784187A | 1995-03-31 | |||
| JPS52132849A | 1977-11-07 | |||
| JPS51107145A | 1976-09-22 | |||
| JPS5170650A | 1976-06-18 | |||
| JP2007079278A | 2007-03-29 | |||
| JP2005031589A | 2005-02-03 |
Noriharu Fujita
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