OBSERVATION DEVICE

Japanese Patent JP2022180889

A

To provide an observation device which is compact and can achieve the high throughput.SOLUTION: An observation device 1 comprises: a macro observation system which images a sample at the reduction magnification; and a micro observation system which contains a nosepiece to which a plurality of objective lenses can be attached and images the sample at the unity magnification or the enlargement magnification. The macro observation system and the micro observation system are arranged so as to satisfy a first condition. In the first condition, a distance c from a macro optical axis P1 to a micro optical axis P2 is equal to or less than the square sum root of the first distance a and the second distance b. The first distance a is the distance between the macro optical axis P1 and the outer diameter center axis P3 of the nosepiece. The second distance b is the distance in the first direction between the outer diameter center axis P3 and the side surface of the nosepiece. The first direction is the direction orthogonal to the macro optical axis P1 and orthogonal to a line segment connecting the macro optical axis P1 and the micro optical axis P2.SELECTED DRAWING: Figure 3

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KAZAMA YOSHIHIRO

JP2021087638A

December 07, 2022

May 25, 2021

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EVIDENT CO LTD

G02B21/00

Hiroyoshi Aoki
Masayuki Amada
Yoshiyuki Osuge
Naoki Yano

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