Title:
OPTICAL BRANCH ELEMENT, OPTICAL BRANCH SYSTEM AND MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2015059743
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To uniform light quantity of branched light.SOLUTION: An optical branched element includes: a first surface; a second surface opposite to the first surface; a first light take-out unit that is provided in a first area where light flux is made incident onto the first surface, and takes out branched light flux from the light flux made incident to the first area; and a second light take-out unit that is provided in a portion other than the portion equivalent to the first light take-out unit in a second area where the light flux reflected in the first area and further reflected on the second surface is radiated, and takes out branched light flux from the light flux made incident the second area.
Inventors:
NAGASAKA KIMIO
UENO HITOSHI
UENO HITOSHI
Application Number:
JP2013191610A
Publication Date:
March 30, 2015
Filing Date:
September 17, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01J3/02; G01J3/447; G01J4/04; G01N21/21
Attorney, Agent or Firm:
Patent business corporation morning-sun patent firm
Previous Patent: 地図表示装置
Next Patent: DEVICE FOR DETERMINING IMAGE INSPECTION RESULT, IMAGE INSPECTION SYSTEM, AND METHOD FOR DETERMINING ...
Next Patent: DEVICE FOR DETERMINING IMAGE INSPECTION RESULT, IMAGE INSPECTION SYSTEM, AND METHOD FOR DETERMINING ...