Title:
OPTICAL DEFLECTOR AND ITS MANUFACTURING METHOD, AND OPTICAL EQUIPMENT USING SAME
Document Type and Number:
Japanese Patent JP2005181926
Kind Code:
A
Abstract:
To provide an optical deflector which is small-sized and low in power consumption and has a hollow part capable of controlling the position of a magnetic body with high precision.
The optical deflector is constituted by supporting both ends of a movable plate on a base substrate by elastic support parts so that the movable plate has free torsional vibration around a torsion axis and forming a reflecting surface on one side of the movable plate, and drives the movable plate relatively to the base substrate to deflect incident light which is incident on the reflecting surface. The movable plate has at least one or more hollow parts formed thereon.
Inventors:
NAKAI NORIYUKI
SHIMADA YASUHIRO
TORASHIMA KAZUTOSHI
SHIMADA YASUHIRO
TORASHIMA KAZUTOSHI
Application Number:
JP2003426308A
Publication Date:
July 07, 2005
Filing Date:
December 24, 2003
Export Citation:
Assignee:
CANON KK
International Classes:
B41J2/44; B81B3/00; B81C1/00; G02B26/10; (IPC1-7): G02B26/10; B41J2/44; B81B3/00; B81C1/00
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio
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