Title:
OPTICAL DEVICE, EXPOSURE DEVICE, AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2003133198
Kind Code:
A
Abstract:
To provide an optical device having a stable optical performance by preventing the vibration and position shift of a reflecting material, due to the effect of a gas flow introduced into a space.
The optical device, having a reflection member FM with two reflection surfaces M1 and M2 forming a prescribed angle with each other in the space a prescribed gas is introduced into, has a gas inlet device 128 which introduces the prescribed gas into the space that the states flow of the prescribed gas at two reflecting surfaces M1 and M2 become substantially equal.
Inventors:
NAGASAKA HIROYUKI
YAMATO SOICHI
YAMATO SOICHI
Application Number:
JP2001322368A
Publication Date:
May 09, 2003
Filing Date:
October 19, 2001
Export Citation:
Assignee:
NIKON CORP
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Attorney, Agent or Firm:
Masatake Shiga (3 outside)