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Title:
OPTICAL ELEMENT UNIT AND INTERFEROMETER
Document Type and Number:
Japanese Patent JP2009008594
Kind Code:
A
Abstract:

To provide an optical element unit held so that deformation or distortion does not occur even when the thickness of a correction plate as an optical element is small, and to provide an interferometer capable of measuring a subject lens at a high measurement accuracy using the optical element unit.

The optical element unit has an optical element and a holding member for holding the optical element. The optical element is a flat plate that has a thickness of 0.05-0.15 mm and is made of synthetic resin or glass. The optical element is stuck to the holding member via a sphere.


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Inventors:
ISHIDA TAKASHI
SOWA SEIJI
NOZAKI AKITOSHI
YOSHIDA SHUNICHIRO
Application Number:
JP2007171942A
Publication Date:
January 15, 2009
Filing Date:
June 29, 2007
Export Citation:
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Assignee:
KONICA MINOLTA OPTO INC
International Classes:
G01B9/02
Domestic Patent References:
JP2004347812A2004-12-09
JP2007078593A2007-03-29



 
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