光学フィルタ及び光量調整装置並びに光学装置

Japanese Patent JP6980364

B2

PROBLEM TO BE SOLVED: To provide an optical filter and a light-amount adjustment device, as well as an optical device that have superior optical antireflection effects.SOLUTION: An optical filter comprises: a transparent substrate; a multi-layer film that is provided on the transparent substrate; and a fine structure that is provided on the multi-layer film, in which the fine structure has a fine structure face that has a fine unevenness structure equal to or less than a wavelength of reflection light upon a boundary face between the multi-layer film and the fine structure with respect to incidence light from the outermost surface. The optical filter is provided with an optical antireflection structure that between a plurality of boundary faces owned by the multi-layer film and a boundary face between the multi-layer film and the transparent substrate, a relation between a phase of the reflection light upon one boundary face with respect to the incidence light from the boundary face between the fine structure and the multi-layer film and a phase of the reflection light upon other boundary face has a relation of an inverse phase in which the phases cancel out with each other due to optical interference.SELECTED DRAWING: Figure 1

JP2012133158	OPTICAL COMPONENT, METHOD OF MANUFACTURING THE OPTICAL COMPONENT, AND IMAGING OPTICAL SYSTEM
JP3721815	OPTICAL ELEMENT AND MANUFACTURE THEREOF

Masashi Uchiyama
Michio Yanagi

JP2016123894A

December 15, 2021

June 22, 2016

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Canon Electronics Inc.

G02B5/00; G02B1/118; G03B9/02; G03B11/00

JP7063915A
JP2014102296A
JP2008008976A
JP2010266661A

WO2012157706A1

Patent Business Corporation Otsuka International Patent Office

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