Title:
OPTICAL PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2017047436
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To maintain flatness of a workpiece in an optical processing device that performs processing while moving the workpiece.SOLUTION: An optical processing device comprises: moving means for moving a workpiece 35 placed on a table surface of a processing table member 53; light irradiation means 1, 2 for irradiating the workpiece placed on the table surface of the processing table member with processing light L; adsorption means 57, 58 for adsorbing the workpiece onto the table surface by a suction force from a suction hole formed on the table surface of the processing table member; and adsorption control means 40 for controlling the adsorption means to adsorb the workpiece onto the table surface in a predetermined suction period during the movement of the workpiece by the moving means.SELECTED DRAWING: Figure 4
Inventors:
TAMURA TOMONORI
ZOGA SOICHI
SHIMIZU KENJI
NAKADA KIKUYA
ZOGA SOICHI
SHIMIZU KENJI
NAKADA KIKUYA
Application Number:
JP2015171212A
Publication Date:
March 09, 2017
Filing Date:
August 31, 2015
Export Citation:
Assignee:
RICOH CO LTD
International Classes:
B23K26/10; B23K26/00; B23K26/02
Attorney, Agent or Firm:
Toshi Kuroda
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