Title:
OPTICAL RECORDING APPARATUS AND ITS METHOD
Document Type and Number:
Japanese Patent JP3881865
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optical recording apparatus capable of acquiring predetermined resolution even when a line width of an exposure pattern is close to a wavelength of exposed light, and reducing time necessary for exposing, and to provide its method.
SOLUTION: An optical recording technique converts light from a light source to modulated light including modulation converted light and phase modulated light to cause the modulated light to form an image on an object to be exposed.
Inventors:
Yukio Taniguchi
Application Number:
JP2001322598A
Publication Date:
February 14, 2007
Filing Date:
October 19, 2001
Export Citation:
Assignee:
LCD Advanced Technology Development Center Co., Ltd.
International Classes:
H01L21/027; G03F1/00; G03F1/26; G03F7/20; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP2001185476A | ||||
| JP2001168003A | ||||
| JP2000021742A | ||||
| JP8022939A | ||||
| JP4293013A |
Attorney, Agent or Firm:
Nobuyuki Matsunaga
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