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Title:
OPTICAL SYSTEM FOR ILLUMINATION AND MICROSCOPE LIGHTING SYSTEM
Document Type and Number:
Japanese Patent JP2006313213
Kind Code:
A
Abstract:

To provide an illumination optical system for enabling bright phase difference observation and dark field observation by obtaining annular illumination without losing light intensity from a light source, and to provide an illumination optical system for an exposure device and a microscope lighting system using it.

The optical system for illumination comprises a light source 11, a condensing optical system 13 for condensing or dispersing light or making a light flux by condensing light flux dispersed from the light source 11, a doughnut lens 10 for annularly condensing the light flux, an annular opening 2 arranged in the neighborhood of a condensing position of the light flux condensed annularly, and a condenser lens 3 for projecting an image of the annular opening 2 at a pupil position 6 of an observation optical system or projection optical system objective lens 5.


Inventors:
KENNO KOKICHI
KUSAKA KENICHI
Application Number:
JP2005135593A
Publication Date:
November 16, 2006
Filing Date:
May 09, 2005
Export Citation:
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Assignee:
OLYMPUS CORP
International Classes:
G02B21/06; G02B21/08; H01L21/027
Domestic Patent References:
JPS26456B1
JPS62154402U1987-09-30
JPH10208273A1998-08-07
JPH07174708A1995-07-14
JP2003270542A2003-09-25
JP2000347105A2000-12-15
JP2000019412A2000-01-21
JP2003059329A2003-02-28
JP2002023061A2002-01-23
JPH0827436B21996-03-21
Attorney, Agent or Firm:
Hiroshi Nagisawa
Ryukichi Abe
Hirukawa Masanobu
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Akira Yonezawa



 
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