Title:
OPTICAL TRANSDUCER ELEMENT AND DISPLACEMENT MEASURING DEVICEWITH SAID ELEMENT
Document Type and Number:
Japanese Patent JPS6287815
Kind Code:
A
Abstract:
A transducer element (1) for converting a displacement of an object connected to the element into an optical signal and a displacement measuring device comprising such an element are described. The transducer element comprises first strips (4) which alternate with second strips (3) in the direction of the displacement to be measured, the first strips comprising phase gratings (4) in which the grating grooves (30) have a width equal to half the grating period (p) and such a depth (d) that the zero-order diffraction beam is suppressed. The device comprises an imaging system (7, 13) having such an aperture that the first and higher-order diffraction beams are not transmitted to a radiation-sensitive detection system (14).
Inventors:
YAN HERARUDO DEIRU
Application Number:
JP23134186A
Publication Date:
April 22, 1987
Filing Date:
October 01, 1986
Export Citation:
Assignee:
PHILIPS NV
International Classes:
G01D5/347; G01D5/38; G01B11/00; H03M1/30; (IPC1-7): G01B11/00; G01D5/38
Domestic Patent References:
| JPS57103136A | 1982-06-26 |
Attorney, Agent or Firm:
Akihide Sugimura
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