Title:
光導波路素子、及び光導波路デバイス
Document Type and Number:
Japanese Patent JP7196736
Kind Code:
B2
Abstract:
In an optical waveguide element, performance deterioration due to recoupling of unnecessary light leaking from an optical waveguide with the optical waveguide is prevented. An optical waveguide element includes an optical substrate on which an optical waveguide is formed, and a support substrate that is bonded to the optical substrate, on a bonded surface of the support substrate bonded to the optical substrate, a recess portion along the optical waveguide on the optical substrate is formed directly under the optical waveguide, a portion of the support substrate from an upper surface of the support substrate to at least a depth of a bottom surface of the recess portion has a refractive index higher than a substrate refractive index of the optical substrate, and the recess portion is filled with a substance having a refractive index lower than the substrate refractive index.
Inventors:
Yuki Nailmoto
Tokuichi Miyazaki
Yu Kataoka
Tokuichi Miyazaki
Yu Kataoka
Application Number:
JP2019067620A
Publication Date:
December 27, 2022
Filing Date:
March 29, 2019
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
International Classes:
G02B6/122; G02B6/12; G02F1/01; G02F1/035
Domestic Patent References:
| JP2012027499A | ||||
| JP2000056278A | ||||
| JP2004341147A | ||||
| JP2009258687A |
Foreign References:
| US6956982 |
Other References:
山根 裕治、他,広帯域LiNbO3光変調器開発へのサンドブラスト法の適用,精密工学会 学術講演会 講演論文集,新井 民夫 社団法人精密工学会,2002年,p.75
Attorney, Agent or Firm:
Kushibuchi International Patent Office