Title:
OPTICAL WAVEGUIDE AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3343846
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain practicable optical circuits integrated with waveguides of quartz glass and silicon on the same substrate by closely and serially connecting quartz glass optical waveguide parts having core part and clad parts both composed of quartz glass and silicon optical waveguide parts having the core parts comprising silicon and the clad parts comprising quartz glass, thereby forming the optical waveguides.
SOLUTION: This optical waveguide is constituted by closely and serially connecting the quartz glass optical waveguide parts and the silicon optical waveguide parts on a silicon substrate 1. The quartz glass optical waveguide parts comprise the rectangular cores 6, the lower clads 5 arranged on the bases of the cores 6 and the upper clads 7 arranged on the flanks and front surfaces of the cores 6. The cores 6 and the clads 5, 7 are formed of the quartz glass. On the other hand, the silicon optical waveguide parts exist above silicon terrace structure parts. The cores 4 formed of the silicon consist of the rib structures in which the lower clad quartz systems are enclosed by the quartz glass layers 2 and the quartz glass 7 on the flanks and front surfaces of the cores 4.
Inventors:
Kuninori Hattori
Kazuyuki Moriwaki
Yasuharu Ohmori
Kazuyuki Moriwaki
Yasuharu Ohmori
Application Number:
JP27821696A
Publication Date:
November 11, 2002
Filing Date:
October 21, 1996
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
G02B6/122; G02B6/13; (IPC1-7): G02B6/13
Domestic Patent References:
| JP451003A | ||||
| JP3196120A | ||||
| JP6167627A | ||||
| JP2244104A |
Other References:
【文献】米国特許5559912(US,A)
Attorney, Agent or Firm:
Yoshikazu Tani (1 person outside)