Title:
TREATMENT DEVICE AND TREATMENT METHOD
Document Type and Number:
Japanese Patent JP3343845
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a means to prevent bubbles from mixing in a treatment liquid in a treatment tank, in which an object to be treated such as wafer, etc., is immersed in the treatment liquid.
SOLUTION: A discharge port 63 of a filling nozzle 62 for filling a treatment liquid into a treatment tank 12 is arranged on the side wall of the tank 12, and the tip end face of the port 63 is made higher as it is apart from the side wall of the tank 12. In addition, when the treatment liquid is discharged through a circulation nozzle 65 on the bottom of the tank 12 so as to circulate the treatment liquid within the tank 12, an air in the nozzle 65 is discharged to the tank 12 through an exhaust circuit before the treatment liquid is discharged from the nozzle 65.
Inventors:
Ichigo Mizumoto
Takahiro Furukawa
Takahiro Furukawa
Application Number:
JP23981696A
Publication Date:
November 11, 2002
Filing Date:
August 22, 1996
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; (IPC1-7): H01L21/304
Domestic Patent References:
| JP786223A | ||||
| JP6267920A | ||||
| JP6349284A | ||||
| JP871513A |
Attorney, Agent or Firm:
Koji Hagiwara (2 outside)
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