Title:
ORGANIC GLASS FILM AND PATTERN FORMING METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2002107935
Kind Code:
A
Abstract:
To provide an organic glass film containing a copolymer of a diallyl carbonate compound and an acid-decomposable allyl carbonate compound and/or an acid-decomposable acrylic ester compound (particularly a monomer forming a hydrophilic group by acid decomposition) and a compound which generates an acid under electron beams and to provide a method for producing a patterned film by patterning the organic glass film with electron beams.
The organic glass film contains a) a copolymer obtained by polymerizing a diallyl carbonate compound of the formula (1) and an acid decomposable allyl carbonate compound and/or an acid decomposable acrylic ester compound and b) a compound which generates an acid under electron beams.
Inventors:
KOSHIKAWA HIROSHI
MAEKAWA YASUNARI
YOSHIDA MASARU
MAEKAWA YASUNARI
YOSHIDA MASARU
Application Number:
JP2000296570A
Publication Date:
April 10, 2002
Filing Date:
September 28, 2000
Export Citation:
Assignee:
JAPAN ATOMIC ENERGY RES INST
International Classes:
G03F7/039; C08F218/00; C08K5/00; C08L31/00; H01L21/027; (IPC1-7): G03F7/039; C08F218/00; C08K5/00; C08L31/00; H01L21/027
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)