ORGANIC GOLD COMPLEX AND PRODUCTION OF GOLD THIN FILM USING THE SAME

Title:

ORGANIC GOLD COMPLEX AND PRODUCTION OF GOLD THIN FILM USING THE SAME

Document Type and Number:

Japanese Patent JP2526769

Kind Code:

B2

Abstract:

PURPOSE: To provide a new organic gold complex having a high vapor pressure and useful as an Au source used for the formation of gold thin films by a CVD method.
CONSTITUTION: The compound of formula I (R is group of formula II or III). For example, a compound of formula IV. The compound of formula I is obtained e.g. by dropping 4,4,4-trifluoro-1-(2-thienyl)-1,3-butanedione in the aqueous solution of a dimethyl gold hydroxy complex and reacting the mixture. The compound of formula I is irradiated with a laser such as an excimer laser for the deposition of the gold to provide a gold thin film.

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Inventors:

Hiroto Uchida
Saito memoir
Masamitsu Sato
Masayuki
Ogumi Katsumi

Application Number:

JP27492992A

Publication Date:

August 21, 1996

Filing Date:

September 21, 1992

Export Citation:

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Assignee:

SAMSUNG ELECTRONICS CO.,LTD.

International Classes:

C07F1/12; C23C14/12; C23C16/18; (IPC1-7): C07F1/12; C23C14/12

Attorney, Agent or Firm:

Shoichi Hirose (1 person outside)

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