Title:
ORGANOMETALLIC COMPOUNDS
Document Type and Number:
Japanese Patent JP2008110961
Kind Code:
A
Abstract:
To provide organometallic compounds useful for a chemical vapor deposition of thin films and an atomic layer deposition.
Organometallic compounds containing an electron donating group-substituted alkenyl ligand are provided. Such compounds are particularly suitable for use as vapor deposition precursors. Also provided are methods of depositing thin films, such as by ALD and CVD, using such compounds.
Inventors:
SHENAI-KHATKHATE DEODATTA V
WANG QING MIN
WANG QING MIN
Application Number:
JP2007197142A
Publication Date:
May 15, 2008
Filing Date:
July 30, 2007
Export Citation:
Assignee:
ROHM & HAAS ELECT MAT
International Classes:
C07F15/00; C07F1/08; C07F3/02; C07F5/00; C07F7/00; C07F7/02; C07F9/00; C07F11/00; C07F15/04; C07F17/00; C07F17/02; C23C16/18
Domestic Patent References:
| JP2005051192A | 2005-02-24 | |||
| JP2001031661A | 2001-02-06 | |||
| JP2005146418A | 2005-06-09 |
Other References:
JPN6012056194; Ｄａｌｔｏｎ Ｔｒａｎｓ． Ｎｏ．１１, 2005, ｐ．１９３０-１９３９
JPN6012056195; Ａｎｇｅｗ．Ｃｈｅｍ．Ｉｎｔ．Ｅｄ． Ｖｏｌ．３８， Ｎｏ．１８, 1999, ｐ．２７５９-２７６１
JPN6012056196; Ｊ．Ａｍ．Ｃｈｅｍ．Ｓｏｃ． Ｖｏｌ．１２７， Ｎｏ．１６, 2005, ｐ．５７８２-５７８３
JPN6012056197; Ｅｕｒ．Ｊ．Ｉｎｏｒｇ．Ｃｈｅｍ． Ｎｏ．３, 2004, ｐ．４６９-４８０
JPN6012056198; Ｏｒｇａｎｏｍｅｔａｌｌｉｃｓ Ｖｏｌ．１６， Ｎｏ．１５, 1997, ｐ．３４８２-３４８８
JPN6012056199; Ｊｏｕｒｎａｌ ｏｆ Ｏｒｇａｎｏｍｅｔａｌｌｉｃ Ｃｈｅｍｉｓｔｒｙ Ｖｏｌ．５３８, 1997, ｐ．３１-４０
JPN6012056200; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．４６, 2005, ｐ．２５３９-２５４２
JPN6012056201; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．３９, 1998, ｐ．４１９-４２２
JPN6012056202; Ｊ．Ａｍ．Ｃｈｅｍ．Ｓｏｃ． Ｖｏｌ．１２４， Ｎｏ．４８, 2002, ｐ．１４３２４-１４３２５
JPN6012056203; Ｊ．Ａｍ．Ｃｈｅｍ．Ｓｏｃ． Ｖｏｌ．１２２， Ｎｏ．３０, 2000, ｐ．７４２４-７４２５
JPN6012056205; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．４０, 1999, ｐ．２１７-２１８
JPN6012056207; Ｔｅｔｒａｈｅｄｒｏｎ Ｖｏｌ．５４, 1998, ｐ．５５５７-５５７４
JPN6012056208; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．４０, 1999, ｐ．２３３１-２３３４
JPN6012056211; Ｊ．Ｃｈｅｍ．Ｓｏｃ．，Ｐｅｒｋｉｎ Ｔｒａｎｓ．１ Ｎｏ．７, 1998, ｐ．１３０９-１３１４
JPN6012056192; Ｊｏｕｒｎａｌ ｏｆ Ｏｒｇａｎｏｍｅｔａｌｌｉｃ Ｃｈｅｍｉｓｔｒｙ Ｖｏｌ．６８３, 2003, ｐ．３３１-３３６
JPN6012056193; Ｏｌｇａｎｏｍｅｔａｌｌｉｃｓ Ｖｏｌ．１９， Ｎｏ．７, 2000, ｐ．１３０８-１３１８
JPN6012056195; Ａｎｇｅｗ．Ｃｈｅｍ．Ｉｎｔ．Ｅｄ． Ｖｏｌ．３８， Ｎｏ．１８, 1999, ｐ．２７５９-２７６１
JPN6012056196; Ｊ．Ａｍ．Ｃｈｅｍ．Ｓｏｃ． Ｖｏｌ．１２７， Ｎｏ．１６, 2005, ｐ．５７８２-５７８３
JPN6012056197; Ｅｕｒ．Ｊ．Ｉｎｏｒｇ．Ｃｈｅｍ． Ｎｏ．３, 2004, ｐ．４６９-４８０
JPN6012056198; Ｏｒｇａｎｏｍｅｔａｌｌｉｃｓ Ｖｏｌ．１６， Ｎｏ．１５, 1997, ｐ．３４８２-３４８８
JPN6012056199; Ｊｏｕｒｎａｌ ｏｆ Ｏｒｇａｎｏｍｅｔａｌｌｉｃ Ｃｈｅｍｉｓｔｒｙ Ｖｏｌ．５３８, 1997, ｐ．３１-４０
JPN6012056200; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．４６, 2005, ｐ．２５３９-２５４２
JPN6012056201; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．３９, 1998, ｐ．４１９-４２２
JPN6012056202; Ｊ．Ａｍ．Ｃｈｅｍ．Ｓｏｃ． Ｖｏｌ．１２４， Ｎｏ．４８, 2002, ｐ．１４３２４-１４３２５
JPN6012056203; Ｊ．Ａｍ．Ｃｈｅｍ．Ｓｏｃ． Ｖｏｌ．１２２， Ｎｏ．３０, 2000, ｐ．７４２４-７４２５
JPN6012056205; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．４０, 1999, ｐ．２１７-２１８
JPN6012056207; Ｔｅｔｒａｈｅｄｒｏｎ Ｖｏｌ．５４, 1998, ｐ．５５５７-５５７４
JPN6012056208; Ｔｅｔｒａｈｅｄｒｏｎ Ｌｅｔｔｅｒｓ Ｖｏｌ．４０, 1999, ｐ．２３３１-２３３４
JPN6012056211; Ｊ．Ｃｈｅｍ．Ｓｏｃ．，Ｐｅｒｋｉｎ Ｔｒａｎｓ．１ Ｎｏ．７, 1998, ｐ．１３０９-１３１４
JPN6012056192; Ｊｏｕｒｎａｌ ｏｆ Ｏｒｇａｎｏｍｅｔａｌｌｉｃ Ｃｈｅｍｉｓｔｒｙ Ｖｏｌ．６８３, 2003, ｐ．３３１-３３６
JPN6012056193; Ｏｌｇａｎｏｍｅｔａｌｌｉｃｓ Ｖｏｌ．１９， Ｎｏ．７, 2000, ｐ．１３０８-１３１８
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office