OZONE WATER GENERATOR, EQUIPMENT FOR CLEANING TREATMENT AND METHOD FOR GENERATING OZONE WATER AND METHOD OF CLEANING TREATMENT

Title:

OZONE WATER GENERATOR, EQUIPMENT FOR CLEANING TREATMENT AND METHOD FOR GENERATING OZONE WATER AND METHOD OF CLEANING TREATMENT

Document Type and Number:

Japanese Patent JP2001053049

Kind Code:

A

Abstract:

To obtain an ozone water generator which can generate ozone water efficiently and an equipment for cleaning treatment.

An ozone water generator which generates ozone water by dissolving ozone gas in water comprises of a cell 23 which generates ozone gas by means of electrolysis of water and electric discharge to the oxygen generated by the electrolysis, a pump 22 which supplies water under a specified pressure, and a gas dissolving module 50 for dissolving ozone gas in water which is connected with the cell 23 and the pump 22 is provided with sensors 53 and 54 which detect at least one of water pressure and ozone-gas pressure, and an air-operation valve 55 which modulates at least one of water pressure and ozone-gas pressure from the resultant pressure detected by the sensors 53 and 54.

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Inventors:

HAYAMIZU NAOYA
SAKURAI NAOAKI
NISHIKI YOSHINORI
KATO MASAAKI
YAMADA KUNIAKI

Application Number:

JP22935799A

Publication Date:

February 23, 2001

Filing Date:

August 13, 1999

Export Citation:

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Assignee:

TOSHIBA CORP
PYUATORON KK

International Classes:

B08B3/08; B01F1/00; C01B13/10; C02F1/46; H01L21/304; (IPC1-7): H01L21/304; B01F1/00; B08B3/08; C01B13/10; C02F1/46

Attorney, Agent or Firm:

Takehiko Suzue (6 outside)

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