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Patent Searching and Data


Title:
【発明の名称】液晶表示装置用薄膜トランジスタの製造方法
Document Type and Number:
Japanese Patent JP3369644
Kind Code:
B2
Inventors:
Manabu Takada
Nobuo Mukai
Application Number:
JP17018893A
Publication Date:
January 20, 2003
Filing Date:
July 09, 1993
Export Citation:
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Assignee:
Toshiba Corporation
International Classes:
G02F1/136; G02F1/1368; H01L21/28; H01L21/336; H01L29/40; H01L29/78; H01L29/786; (IPC1-7): H01L21/336; G02F1/1368; H01L21/28; H01L29/786
Attorney, Agent or Firm:
Saichi Suyama