Title:
PACKAGE, MANUFACTURING METHOD OF PACKAGE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND ATOMIC CLOCK
Document Type and Number:
Japanese Patent JP2013078077
Kind Code:
A
Abstract:
To provide a package which inhibits corrosion of a joining member and is excellent in airtightness, a manufacturing method of the package, a piezoelectric vibrator, an oscillator, an electronic apparatus, and an atomic clock.
A frame region 3c of a lid substrate 3 is anodically-bonded to a base substrate 2 through a joining material 23 which is formed on a surface 2b of the base substrate 2 and contains Al. A first protection film 11a, composed of passivated Al, is formed at an outer surface of the package 10 so as to cover the joining material 23 exposed between the base substrate 2 and the lid substrate 3.
Inventors:
KOBAYASHI TAKASHI
FUKUCHI SEIGO
FUKUCHI SEIGO
Application Number:
JP2011218232A
Publication Date:
April 25, 2013
Filing Date:
September 30, 2011
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
H03H9/02; H01L41/09; H01L41/18; H01L41/22; H03B5/32; H03H3/02
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura