Title:
パドル、該パドルを備えた処理装置、および該パドルの製造方法
Document Type and Number:
Japanese Patent JP7219239
Kind Code:
B2
Abstract:
A paddle capable of reducing an influence of blocking the electric field and capable of improving its mechanical strength is disclosed. The paddle, which is configured to agitate a processing liquid in a processing tank by moving in the processing tank, includes a plurality of agitating beams that form a honeycomb structure. The honeycomb structure has a plurality of hexagonal through-holes formed by the plurality of agitating beams.
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Inventors:
Yasuyuki Masuda
Zhang Shao Hua
Yoshitaka Mukaiyama
Tadashi Shimoyama
Junpei Fujikata
Zhang Shao Hua
Yoshitaka Mukaiyama
Tadashi Shimoyama
Junpei Fujikata
Application Number:
JP2020027004A
Publication Date:
February 07, 2023
Filing Date:
February 20, 2020
Export Citation:
Assignee:
Ebara Corporation
International Classes:
C25D21/10; B29C64/386; B33Y10/00; B33Y50/00; C25D7/12
Domestic Patent References:
| JP2012126966A | ||||
| JP2000129496A |
Foreign References:
| CN1632213A | ||||
| WO2017130469A1 | ||||
| US8440065 |
Attorney, Agent or Firm:
Tetsuya Hirosawa
Yutaro Watanabe
Goto Manabu
Mitsuhiro Kanazawa
Yutaro Watanabe
Goto Manabu
Mitsuhiro Kanazawa
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