Title:
PARALLEL LINK MECHANISM
Document Type and Number:
Japanese Patent JP3662099
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To control the position and attitude of a moving member with high accuracy by optically detecting the attitude, X, Y displacements, and X displacement of the moving member, and obtaining the displacement and attitude of the moving member based on the detected results.
SOLUTION: In the attitude detection of a parallel link mechanism, the rotation angle γ around the X-axis of a moving plate 2 and the rotation angle βaround the Y-axis can be detected as the displacement of a converging spot on a second position detector 22. In the position detection of the parallel link mechanism, the displacements in the X-direction and the Y-direction can be detected as the displacements of a converging spot on a first position detector 8 and a converging spot on the second position detector 22. The displacement in the Z-direction can be detected as the displacement of a converging spot on a third position detector 24. The output signals of the first through third position detectors 8, 22, 24 are amplified and fed to an arithmetic circuit, and the displacement state of the moving plate 2 is obtained and fed to the controller of the parallel link mechanism.
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Inventors:
Kouki
Application Number:
JP25855197A
Publication Date:
June 22, 2005
Filing Date:
September 24, 1997
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
B25J9/10; B23Q1/54; B25J7/00; B25J9/02; B25J11/00; B25J13/08; B25J17/00; H01L41/09; (IPC1-7): B25J11/00; B25J9/10; B25J13/08; B25J17/00
Domestic Patent References:
| JP11114777A | ||||
| JP6170761A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Atsushi Tsuboi
Tetsuya Kazama
Koji Mizuno
Sadao Muramatsu
Atsushi Tsuboi
Tetsuya Kazama
Koji Mizuno