To provide a particle detector with high sensitivity.
The particle detector comprises: first detection means having a first light source for irradiating an object to be detected that moves in a flow passage with light and a first detection section for detecting first optical information from the object to be detected irradiated with the light; second detection means located in the downstream side of the first detection means having a second light source, a light deflector for deflecting light from the second light source and irradiating the object to be detected with deflected light, and a second detection section for detecting second optical information from the object to be detected irradiated with the deflected light; and control means for controlling the light deflector such that the deflected light tracks the object to be detected.
HASHIGUCHI TSUYOSHI
NAKAGAWA ATSUSHI
SAKAI ATSUSHI
Next Patent: DIFFERENTIAL PRESSURE AND PRESSURE GAUGE