Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PATTERN-INSPECTION METHOD AND APPARATUS, AND MASK- MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2003287419
Kind Code:
A
Abstract:

To provide an accurate mask pattern-inspection method, an accurate mask pattern-inspection apparatus, and a manufacturing method of a mask using the apparatus.

When reference data are to be compared with sensor data by a comparison means 6, a correction value where an adjacent pattern whose measurement is completed is corrected by predetermined pattern conditions.


More Like This:
JP3594026SURFACE STATE INSPECTION METHOD OF CURVED-SURFACE BODY AND BOARD INSPECTION METHOD
JP4316853Surface inspection method and equipment
JP2020101417INSPECTION SYSTEM
Inventors:
OKUDA KENTARO
SAWA EIJI
INOUE HIROSHI
Application Number:
JP2002088817A
Publication Date:
October 10, 2003
Filing Date:
March 27, 2002
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOSHIBA CORP
International Classes:
G01B11/30; G01B21/30; G01N21/956; G03F1/68; G03F1/84; G06T1/00; G06T7/00; H01L21/027; H01L21/66; (IPC1-7): G01B21/30; G01B11/30; G01N21/956; G03F1/08; G06T1/00; G06T7/00; H01L21/027; H01L21/66
Domestic Patent References:
JP2001272217A2001-10-05
JPH10260021A1998-09-29
JPH11160039A1999-06-18
JPH0325357A1991-02-04
JP2001338304A2001-12-07
JPH056928A1993-01-14
JPH04109104A1992-04-10
JPS6031235A1985-02-18
Attorney, Agent or Firm:
Norio Ogo (2 outside)



 
Previous Patent: STEERING ANGLE-DETECTING APPARATUS

Next Patent: RANGING SENSOR, ELECTRONIC EQUIPMENT HAVING THE SAME, AND MANUFACTURING METHOD OF THE RANGING SENSOR