Title:
PERMEABILITY MEASUREMENT METHOD AND PERMEABILITY MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2018189529
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To realize a transmittance measurement method capable of stably measuring a transmittance of an opaque resin film having three-degrees of an overdose.SOLUTION: A transmittance measurement method forms a horizontally shifted interference image on an imaging device by irradiating illumination beams to a monitor pattern. An interference image (21) formed by transmitted beams having transmitted a transparent substrate only and the interference images (22a, 22b) between the transmitted light having transmitted both the transparent substrate and the shielding film are formed by adjusting a horizontally shifted amount of the shearing interferometer. Subsequently, phase modulation for one cycle is performed, and amplitude of the phase modulation of each interference image is measured. In the present invention, the transmittance of the shielding layer can be calculated by calculating the square of a ratio of the amplitude of the phase modulation data of the interference images between the transmitted light transmitting the transparent substrate only and the transmitting light transmitting both of the transparent substrate and the shielding layer. As a result, the transmittance can be stably measured without being affected by disturbance even in the case of the shielding layer having an extremely low transmittance.SELECTED DRAWING: Figure 1
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Inventors:
TADA MITSUHIRO
TAKIZAWA HIDERO
NOZAWA HIROTO
TAKIZAWA HIDERO
NOZAWA HIROTO
Application Number:
JP2017092787A
Publication Date:
November 29, 2018
Filing Date:
May 09, 2017
Export Citation:
Assignee:
LASERTEC CORP
International Classes:
G01N21/59; G01J9/02; G01M11/00; G03F1/44; G03F1/54
Attorney, Agent or Firm:
Kenjiro Oyama