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Patent Searching and Data


Title:
PFC GAS COMBUSTION DETOXIFYING APPARATUS, AND PFC GAS COMBUSTION DETOXIFYING METHOD
Document Type and Number:
Japanese Patent JP2002317916
Kind Code:
A
Abstract:

To provide a PFC gas combustion detoxifying apparatus capable of preventing corrosion and any byproduct in the apparatus from being produced upon combustion detoxifying of the PFC gas.

The PFC gas combustion detoxifying apparatus comprises a combustion furnace, a gas introduction section provided adjacent to the combustion furnace, and a wet scrubber connected with the gas introduction section through piping. Branch tubes branching in the direction of gravity is characteristically provided o the piping connecting the gas introduction section and the wet type scrubber.


Inventors:
UEHARA MASAYUKI
YAMAMICHI HIROYASU
Application Number:
JP2001123519A
Publication Date:
October 31, 2002
Filing Date:
April 20, 2001
Export Citation:
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Assignee:
NEC CORP
International Classes:
B01D53/14; B01D53/34; F23G7/06; B01D53/70; (IPC1-7): F23G7/06
Attorney, Agent or Firm:
Akira Muneaki