位相差測定装置 - JASCO Corporation

Title:

位相差測定装置

Document Type and Number:

Japanese Patent JP5289989

Kind Code:

B2

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Inventors:

Akio Wada
Tomoyuki Fukasawa
Tsutomu Inoue
Fuminori Sato
Mitsuru Sano
Masao
Katsuji Hasegawa

Application Number:

JP2009015196A

Publication Date:

September 11, 2013

Filing Date:

January 27, 2009

Export Citation:

Assignee:

JASCO Corporation

International Classes:

G01N21/23; G01J4/04

Domestic Patent References:

Attorney, Agent or Firm:

Yuji Iwahashi

Previous Patent: JPS5289988

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