Title:
PHASE SHIFTING AMOUNT MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JPH1114462
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a phase shifting amount measuring instrument which can measure the phase shifting amount of a phase shifter by using both light emitted from a lamp and laser light emitted from a laser. SOLUTION: In an instrument which measures the phase shifting amount of a phase shifter 7b based on the intensity of interference which is caused when two light rays transmitted through a phase shifting mask 7 are superposed upon another by irradiating the mask 7 with two separated light rays which are generated by shifting the light emitted from an Hg-Xe lamp 1 in the lateral direction through grating slits 5, a KrF laser oscillator 30, a diffusing plate 31 which diffuses the laser light outputted from the laser oscillator 30, and a switching mirror 34 which switches the light irradiating the mask 7 to the laser light passed through the diffusing plate 31 or the light emitted from the lamp 1 are provided.
Inventors:
FUJIWARA TAKESHI
OHASHI KATSUKI
ONO AKIRA
OHASHI KATSUKI
ONO AKIRA
Application Number:
JP16728897A
Publication Date:
January 22, 1999
Filing Date:
June 24, 1997
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01J9/00; G01N21/45; (IPC1-7): G01J9/00; G01N21/45