Title:
PHONONIC WAVEGUIDE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2014166610
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a phononic waveguide which is compatible with a mechanical element and in which mechanical oscillation propagating wave can be controlled spatially and kinetically.SOLUTION: A phononic waveguide comprises a substrate (100), a waveguide part (108) which is arranged with a space between the substrate (100) and is constituted by a thin film of a piezoelectric material, a supporting part (101) which is formed on the substrate (100) and supports the waveguide part (108) from the direction vertical to the propagation direction of mechanical oscillation, and a membrane mechanical oscillator (110) which is constituted by a thin film that is arranged to couple with the waveguide part (108). Plural holes (106a) are formed in the waveguide part (108), and the waveguide part (108) is arranged along the aligning direction of the holes (106a).
More Like This:
| JPH05237130 | ACOUSTIC PRESSURE IMPULSE GENERATOR |
Inventors:
HATANAKA DAIKI
YAMAGUCHI KOJI
IMRAN MAHBOOB
YAMAGUCHI KOJI
IMRAN MAHBOOB
Application Number:
JP2013039164A
Publication Date:
September 11, 2014
Filing Date:
February 28, 2013
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
B06B3/00
Domestic Patent References:
| JP2009094798A | 2009-04-30 | |||
| JP2002532749A | 2002-10-02 | |||
| JP2009094798A | 2009-04-30 |
Foreign References:
| US20090295505A1 | 2009-12-03 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Yuzo Koike
Shigeki Yamakawa
Yuzo Koike
Previous Patent: HYDROGEN WATER FEEDING DEVICE
Next Patent: FILTER BODY, FILTER DEVICE, AND SEA WATER TREATMENT APPARATUS
Next Patent: FILTER BODY, FILTER DEVICE, AND SEA WATER TREATMENT APPARATUS