Title:
光電陰極設計、および光電陰極を使用して電子ビームを生成する方法
Document Type and Number:
Japanese Patent JP7082660
Kind Code:
B2
Abstract:
A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.
More Like This:
| JPH0628970 | POLARIZED ELECTRON BEAM GENERATING ELEMENT |
| JP4939033 | Photocathode |
Inventors:
Ioka Midi Katerina
Delgado Gildaldo
Romero Mike
Hill Francis
Garcia Rudy
Delgado Gildaldo
Romero Mike
Hill Francis
Garcia Rudy
Application Number:
JP2020519764A
Publication Date:
June 08, 2022
Filing Date:
October 10, 2018
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J1/34; H01J37/06; H01J40/06; H01L21/66
Domestic Patent References:
| JP2016126839A | ||||
| JP2007042559A | ||||
| JP2005203280A |
Foreign References:
| US20060055321 |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office