Title:
PHOTOCATHODE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2021150068
Kind Code:
A
Abstract:
To provide a photocathode whose quantum efficiency is improved and which can be manufactured efficiently, and a manufacturing method of the same.SOLUTION: A photocathode 1 includes a substrate 100, a photoelectric conversion layer 400, which is provided on the substrate 100 and generates photoelectrons in response to incident light, and an intermediate layer 200, which is provided between the substrate 100 and the photoelectric conversion layer 400 in contact with the substrate 100. The intermediate layer 200 contains a hafnium nitride.SELECTED DRAWING: Figure 2
Inventors:
KAWAI TERUNORI
TORII YOSHITAKA
YAMASHITA SHINICHI
TORII YOSHITAKA
YAMASHITA SHINICHI
Application Number:
JP2020046645A
Publication Date:
September 27, 2021
Filing Date:
March 17, 2020
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01J40/06; H01J1/34; H01J9/12
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Kenichi Shibayama
Yoshiki Kuroki
Kenichi Shibayama