光パターニング可能なフッ素フリーフェノール官能基含有ポリマー組成物

Title:

光パターニング可能なフッ素フリーフェノール官能基含有ポリマー組成物

Document Type and Number:

Japanese Patent JP6605720

Kind Code:

B2

Abstract:

Various polycycloolefinic polymers containing phenolic pendent groups and compositions thereof useful for forming self-imageable films encompassing such polymers are disclosed. Such polymers encompass norbornene-type repeating units containing phenolic pendent groups which contain very low levels of fluorine containing monomers. The films formed from such polymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.

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Inventors:

Edmond, Else
Lois, groff

Application Number:

JP2018515559A

Publication Date:

November 13, 2019

Filing Date:

September 27, 2016

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Assignee:

Promelas, LLC

International Classes:

C08F232/00; C08L45/00; C08L63/00; G03F7/023

Domestic Patent References:

JP2014504310A
JP2010519340A
JP2008506010A
JP2010519594A

Foreign References:

US20110104614

Attorney, Agent or Firm:

Makoto Abe
Michiko Oi
Seiji Tani

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