Title:
フォトレジスト剥離剤組成物
Document Type and Number:
Japanese Patent JP4582278
Kind Code:
B2
Inventors:
Maruyama Taketo
Satoshi Minamiba
Hisaki Abe
Aoyama Tetsuo
Satoshi Minamiba
Hisaki Abe
Aoyama Tetsuo
Application Number:
JP2001190128A
Publication Date:
November 17, 2010
Filing Date:
June 22, 2001
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
G03F7/42; C09D9/00; H01L21/027; H01L21/308
Domestic Patent References:
| JP11316464A | ||||
| JP2000267302A | ||||
| JP2000214599A | ||||
| JP2000284506A |
Attorney, Agent or Firm:
Takashi Nagai