Title:
感光性ポリイミド前駆体組成物および金属箔-ポリイミド複合体
Document Type and Number:
Japanese Patent JP4048598
Kind Code:
B2
Inventors:
Fujimoto Koji
Yasuo Miura
Yasuo Miura
Application Number:
JP12871598A
Publication Date:
February 20, 2008
Filing Date:
May 12, 1998
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
G03F7/037; G03F7/038; B32B15/08; B32B15/088; C08L79/08; G03F7/09; H01L21/027
Domestic Patent References:
| JP8337652A | ||||
| JP64062355A | ||||
| JP63317553A | ||||
| JP10158397A | ||||
| JP10301279A | ||||
| JP10326011A | ||||
| JP11015156A | ||||
| JP11160870A |