感光性樹脂組成物、及び硬化レリーフパターンの形成方法

Title:

感光性樹脂組成物、及び硬化レリーフパターンの形成方法

Document Type and Number:

Japanese Patent JP6503160

Kind Code:

B2

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Inventors:

Tatsuya Hirata

Application Number:

JP2014139833A

Publication Date:

April 17, 2019

Filing Date:

July 07, 2014

Export Citation:

Assignee:

ASAHI KASEI KABUSHIKI KAISHA

International Classes:

G03F7/023; C08G14/04; G03F7/004

Domestic Patent References:

Foreign References:

WO2013085004A1
US20110294243

Attorney, Agent or Firm:

Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Kazuhiro Nakamura
Hideo Katsumata
Shunsuke Mima
Toko Saito

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