Title:
感光性基材、それを用いたレジストパターンの形成方法およびポジ型レジスト組成物
Document Type and Number:
Japanese Patent JP3998901
Kind Code:
B2
Inventors:
Kazuki Okubo
Kazuhito Sato
Kazuyuki Nitta
Toshiyuki Ogata
Kazuhito Sato
Kazuyuki Nitta
Toshiyuki Ogata
Application Number:
JP2000263211A
Publication Date:
October 31, 2007
Filing Date:
August 31, 2000
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
G03F7/039; C08F212/14; C08F220/10; C08K5/00; C08L61/08; C08L101/06; G03F7/004; H01L21/027
Domestic Patent References:
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| JP6130670A | ||||
| JP6266107A | ||||
| JP6266109A | ||||
| JP6273924A | ||||
| JP6188185A | ||||
| JP11202491A | ||||
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| JP9134015A | ||||
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| JP5313371A | ||||
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Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai