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Title:
PHOTOSENSITIVE TRANSFER MATERIAL, PHOTOMASK MATERIAL, PHOTOMASK, AND METHOD FOR PRODUCING PHOTOMASK
Document Type and Number:
Japanese Patent JP2003156841
Kind Code:
A
Abstract:

To provide a photosensitive transfer material and a photomask material with a photosensitive layer having such photosensitivity as to enable pattern formation with light of ≥405 nm wavelength as well as high sensitivity, high mechanical strength, high hardness, and good solvent resistance, to provide a method for producing a photomask from the photosensitive transfer material or the photomask material, and to provide a photomask.

The photosensitive transfer material has on a temporary support at least a photosensitive layer comprising i) at least one alkali-soluble resin binder of formula (1) having polymerizable unsaturated bonds, ii) a monomer having at least one polymerizable unsaturated bond, iii) a photopolymerization initiation system having photosensitivity to light in a long wavelength band of ≥405 nm, and iv) a colorant. In the formula (1), R is H or methyl; X is the residue of a polycarboxylic acid; and n is an integer of 0-20.


Inventors:
TAKAYANAGI TAKASHI
Application Number:
JP2001355716A
Publication Date:
May 30, 2003
Filing Date:
November 21, 2001
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F7/027; G03F1/48; G03F1/54; G03F1/56; G03F7/11; G03F7/40; (IPC1-7): G03F7/027; G03F1/08; G03F1/14; G03F7/11; G03F7/40
Attorney, Agent or Firm:
Atsushi Nakajima (3 outside)