To provide: an acceleration detection device capable of avoiding damage on a movable part and an acceleration detection element caused by collision of the part and the element with an inner surface of a package and displacement beyond the strength limit; and an acceleration detector and an electronic apparatus including the acceleration detection device.
An acceleration detection device comprises: a base part 10; a movable part 12; a physical quantity detection element 13; a support part 14 including a portion extending from the base part along the movable part in plan view; and a mass part 15 arranged on the movable part. The support part has a free end at an opposite side to the base part side in plan view. A part of the mass part overlaps with the support part respectively in plan view and in front view. The movable part is displaceable in a direction crossing with a principal plane around a joint as fulcrum in accordance with acceleration applied in the direction crossing with the principal plane or gravitational acceleration. A gap is provided between the mass part and the support part respectively in each area where the mass part and the support part overlap with each other.
Osamu Suzawa
Kazuhiko Miyasaka